CEI EN 62047-21 : 2016
Current
The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 21: TEST METHOD FOR POISSON'S RATIO OF THIN FILM MEMS MATERIALS
Hardcopy , PDF
English
01-01-2016
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FOREWORD
1 Scope
2 Normative references
3 Terms, definitions, symbols and designations
4 Test piece
5 Testing method and test apparatus
6 Test report
Annex A (informative) - Measurement example of Poisson's
ratio using type 1 test piece
Annex B (informative) - Analysis of test results obtained from
a type 2 test piece
Bibliography
Annex ZA (normative) - Normative references to international
publications with their corresponding European
publications
Defines the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 [mu]m.
| Committee |
CT 309
|
| DevelopmentNote |
Classificazione CEI 47-130. (06/2016)
|
| DocumentType |
Standard
|
| Pages |
22
|
| PublisherName |
Comitato Elettrotecnico Italiano
|
| Status |
Current
|
| Standards | Relationship |
| EN 62047-21:2014 | Identical |
| IEC 62047-21:2014 | Identical |
| ASTM E 132 : 2017 : REDLINE | Standard Test Method for Poisson’s Ratio at Room Temperature |
| IEC 62047-8:2011 | Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films |
| EN 62047-8:2011 | Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films |
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