CEI EN 62047-26 : 2016
Current
Current
The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 26: DESCRIPTION AND MEASUREMENT METHODS FOR MICRO TRENCH AND NEEDLE STRUCTURES
Available format(s)
Hardcopy , PDF
Language(s)
English
Published date
01-01-2016
Publisher
€79.38
Excluding VAT
FASC 15205 E.
| Committee |
CT 309
|
| DevelopmentNote |
Classificazione CEI 47-34. (12/2016)
|
| DocumentType |
Standard
|
| Pages |
36
|
| PublisherName |
Comitato Elettrotecnico Italiano
|
| Status |
Current
|
| Standards | Relationship |
| IEC 62047-26:2016 | Identical |
| EN 62047-26:2016 | Identical |
Summarise
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