CEI EN 62047-8 : 2012
Current
The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 8: STRIP BENDING TEST METHOD FOR TENSILE PROPERTY MEASUREMENT OF THIN FILMS
Hardcopy , PDF
English
01-01-2012
FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Test apparatus
5 Test piece
6 Test procedure and analysis
7 Test report
Annex A (informative) - Data analysis: Test results
by using nanoindentation apparatus
Annex B (informative) - Test piece fabrication:
MEMS process
Annex C (informative) - Effect of misalignment and
geometry on property measurement
Bibliography
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