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CGA G-13:2023
Current
The latest, up-to-date edition.
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Storage and Handling of Silane and Silane Mixtures
Hardcopy
English
06-01-2023
1 Introduction 2 Scope and purpose 3 Definitions 4 Physical and chemical properties 5 Packaging information 6 Outdoor storage and use 7 Indoor storage and use 8 System configuration - cylinder sources 9 System configuration - bulk sources 10 Piping and components 11 Gas and flame detection 12 Fire protection system 13 Ventilation systems 14 Venting and treatment 15 Purge gas system 16 Electrical requirements 17 Fundamental supervisory control requirements 18 Container filling 19 References 20 Additional references.
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