CGA P 32 : 2000

1 Introduction
2 Scope and purpose
   2.1 Scope
   2.2 Purpose
3 Definitions
   3.1 Barrier, shield
   3.2 Blast wall
   3.3 Container
   3.4 Deflagration
   3.5 Detonation
   3.6 Explosion control
   3.7 Fire partition
   3.8 Flammable limits
   3.9 Gas cabinet
   3.10 Instrument nomenclature
   3.11 Laminar burning velocity
   3.12 Location
   3.13 Nitrogen, facility, or house
   3.14 Panel
   3.15 Pigtail
   3.16 Piloted ignition
   3.17 Part per million (ppm)
   3.18 Rack system
   3.19 Shall
   3.20 Silane systems and sources
   3.21 Site
   3.22 Ultra high integrity service (UHIS)
   3.23 Valve
4 Physical and chemical properties
   4.1 Description
   4.2 Properties
   4.3 Pyrophoric nature of silane
   4.4 Health hazards
   4.5 Gaseous/liquid phase of silane
5 Packaging information
6 Outdoor storage and use
   6.1 General
   6.2 Cylinder storage
   6.3 Cylinder and bulk use
7 Indoor storage and use
   7.1 Indoor systems
   7.2 Building construction
   7.3 Quantity limits - buildings containing mixed
         uses
   7.4 Quantity limits - detached buildings
   7.5 Separation from incompatible materials
   7.6 Gas cabinets
   7.7 Other requirements
8 System configuration - cylinder sources
   8.1 Outdoor installations
   8.2 Indoor installations
9 System configuration - bulk sources
   9.1 Use equipment
   9.2 Bulk containers
   9.3 Pressure relief devices
   9.4 Bulk source process panel
   9.5 Valve manifold box
10 Piping and components
   10.1 Piping system design
   10.2 Components
   10.3 Support of exterior piping
11 Gas and flame detection
   11.1 Gas monitoring
   11.2 Flame detection
12 Fire protection system
   12.1 General
   12.2 Outdoor systems
   12.3 Indoor systems
13 Ventilation systems
   13.1 Outdoor systems
   13.2 Indoor systems
14 Venting and treatment
   14.1 General
   14.2 Disposal options
   14.3 Treatment system requirements
   14.4 Direct venting into exhaust ducts
   14.5 Dedicated process vent
15 Inert gas system
   15.1 Process line purge source
   15.2 Vent-line purge source
   15.3 Vacuum generator inert source
   15.4 Pneumatic line source
16 Electrical requirements
   16.1 General
   16.2 Outdoor electrical systems
17 References
18 Related documents
Tables and Figures
Appendices
Appendix A - Personnel protection
Appendix B - Silane compressibility
Appendix C - Thermal radiation
Appendix D - Overpressure

Describes safe storage and handling of silane and silane mixtures including practice methods applicable for silane manufacturers, suppliers and end users. P-32 addresses cylinder delivery of silane gas to bulk silane delivery systems, and for the semi- conductor user community, it includes storage and handling at the user site and guidelines for the interconnecting piping system up to the distribution piping in the manufacturing facility. Setback distances, based on heat radiation produced in various silane release scenario's, are defined considering overpressure due to silane release that may cause explosions. The technical content is based on experimental testing conducted by CGA, Factory Mutual and SEMATECH. P-32 does not address silane usage and handling within the clean room areas.