DIN 28429:2014-05
Current
The latest, up-to-date edition.
VACUUM TECHNOLOGY - ACCEPTANCE SPECIFICATIONS FOR ION GETTER PUMPS
Hardcopy , PDF
German
01-05-2014
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1 Scope and field of application
2 Determination of final pressure
2.1 Concept
2.2 Measurement conditions
2.3 Measuring equipment
2.4 Bakeout and measuring method
3 Determination of air volume flow rate
3.1 Concepts
3.2 Measuring equipment
3.3 Method of measurement of the pV flow rate whilst
measuring the volume flow rate
3.4 Procedure
4 Measuring the starting pressure
4.1 Concept
4.2 Procedure
5 Measuring the magnetic stray field
6 Measuring the power input
7 Checking the connecting dimensions
8 Checking the mass
9 Test report
Applies to sputter ion pumps 1) (hereinafter briefly referred to as pumps) with a nominal volume flow rate greater than 10l.s-1 and with the pressure range for the determination of the volume flow rate lying between 1,5.10-5 mbar and 1.10-9 mbar.
| DocumentType |
Standard
|
| Pages |
13
|
| PublisherName |
German Institute for Standardisation (Deutsches Institut für Normung)
|
| Status |
Current
|
| DIN 28400-7:1978-07 | VACUUM TECHNOLOGY; TERMS AND DEFINITIONS, VACUUM METALLURGY |
| DIN 28401:2008-03 | Vacuum technology - Graphical symbols - Summary |
| DIN 28428:1978-11 | Vacuum technology; acceptance specifications for turbomolecular pumps |
| DIN 28400-1:1990-05 | VACUUM TECHNOLOGY - TERMS AND DEFINITIONS - GENERAL TERMS |
| ISO 21360-1:2012 | Vacuum technology Standard methods for measuring vacuum-pump performance Part 1: General description |
| DIN 28400-2:1980-10 | VACUUM TECHNOLOGY; TERMS AND DEFINITIONS, VACUUM PUMPS |
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