DIN 50441-4:1999-03
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
TESTING OF MATERIALS FOR SEMICONDUCTOR TECHNOLOGY - DETERMINATION OF THE GEOMETRIC DIMENSIONS OF SEMICONDUCTOR WAFERS - PART 4: SLICE DIAMETER, DIAMETER VARIATION, FLAT DIAMETER, FLAT LENGTH, FLAT DEPTH
Hardcopy , PDF
01-01-2009
English
12-01-2013
Gives methods for measuring the diameter, variations in diameter, and flat diameter, depth and length of circular semi-conductor wafers.
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