DIN 50451-2:2003-04
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Determination of trace elements in liquids for use in semiconductor technology - Part 2: Determination of calcium, chromium, cobalt, copper, iron, nickel and zinc in hydrofluoric acid by plasma emission spectroscopy
Hardcopy , PDF
02-10-2023
English, German
01-04-2003
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Foreword
1 Scope
2 Normative references
3 Concept
4 Unit
5 Principle
6 Reagents
7 Apparatus and cleaning
8 Sampling
9 Sample pretreatment
10 Preparation of blank solutions
11 Procedure
12 Calculation and expression of results
13 Precision
14 Test report
The method described serves to examine, by plasma-induced (ICP or DCP) spectrometry, hydrofluoric acid for the presence of cobalt (Co), chromium (Cr), copper (Cu) and iron (Fe) and nickel (Ni) in amounts of 1 to 1000 ng/g. The presence of these metals is of relevance in the field of semi-conductor technology.
| DocumentType |
Standard
|
| Pages |
4
|
| PublisherName |
German Institute for Standardisation (Deutsches Institut für Normung)
|
| Status |
Withdrawn
|
| Supersedes |
| DIN EN ISO 14644-1:2016-06 | CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 1: CLASSIFICATION OF AIR CLEANLINESS BY PARTICLE CONCENTRATION (ISO 14644-1:2015) |
| DIN 51401-1:2001-12 | ATOMIC ABSORPTION SPECTROMETRY (AAS) - PART 1: TERMS |
| ISO 1042:1998 | Laboratory glassware — One-mark volumetric flasks |
| DIN 51008-2:2001-12 | OPTICAL EMISSION SPECTROMETRY (OES) - PART 2: TERMS FOR FLAME AND PLASMA SYSTEMS |
| DIN 8120-1:1981-07 | WEIGHING MACHINES; TERMS AND DEFINITIONS |
| DIN 32645:2008-11 | CHEMICAL ANALYSIS - DECISION LIMIT, DETECTION LIMIT AND DETERMINATION LIMIT UNDER REPEATABILITY CONDITIONS - TERMS, METHODS, EVALUATION |
| ISO 8655-2:2002 | Piston-operated volumetric apparatus Part 2: Piston pipettes |
| ISO 14644-1:2015 | Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration |
| ISO 3696:1987 | Water for analytical laboratory use — Specification and test methods |
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