DIN IEC 62417:2007-08 (Draft)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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MOBILE ION TESTS - BIAS TEMPERATURE STRESS (BTS) - TRIANGULAR VOLTAGE SWEEP (TVS)
01-12-2010
12-01-2013
Dies Dokument legt ein BTS-Prüfverfahren (Spannungs-Temperatur-Beanspruchung/Bias-Temperature-Stress) und ein TVS-Prüfverfahren (Dreieck-Spannungsverlauf/Triangular-Voltage-Sweep) für die Ermittlung der Menge positiver mobiler Ionen in der Oxidschicht auf Waferniveau fest.
| DocumentType |
Draft
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| PublisherName |
German Institute for Standardisation (Deutsches Institut für Normung)
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| Status |
Superseded
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| SupersededBy |
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