DIN V VDE V 0126-18-2-3 : 2007
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SOLAR WAFERS - PART 2-3: MEASURING THE GEOMETRIC DIMENSIONS OF SILICON WAFERS - WAVINESS AND WARPING
Superseded date
01-12-2009
Superseded by
Published date
12-01-2013
Publisher
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Diese Norm dient dazu, die Werte für die Welligkeit und die Durchbiegung von kristallinen Siliciumscheiben zu bestimmen.
| DocumentType |
Standard
|
| PublisherName |
Verband Deutscher Elektrotechniker
|
| Status |
Superseded
|
| SupersededBy |
| Standards | Relationship |
| VDE 0126-18-2-3 : 2007 | Identical |
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