DS/ISO 14644-9:2022
Current
Current
The latest, up-to-date edition.
Cleanrooms and associated controlled environments – Part 9: Assessment of surface cleanliness for particle concentration
Published date
31-05-2022
Publisher
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This document establishes a procedure for the assessment of particle cleanliness levels on solid surfaces in cleanrooms and associated controlled environment applications.
Committee |
DS/S-438
|
DocumentType |
Standard
|
PublisherName |
Danish Standards
|
Status |
Current
|
Standards | Relationship |
ISO 14644-9:2022 | Identical |
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