EN 1518:1998

Foreword
1 Scope
2 Normative references
3 Definitions
4 Description of an MSLD
5 Apparatus for methods of characterization
6 Reference conditions for characterization
7 Test procedures
8 Results
9 Test report

This European Standard specifies terms and procedures for the characterization of mass spectrometer leak detectors (MSLD). It is not intended to give a complete set of specifications for an acceptance test but a description of procedures that can be used without particular calibration equipment. An MSLD has an integral high vacuum system for maintaining the sensing element (mass spectrometer) at low operating pressure and for establishing a partial pressure related to the incoming gas flow.