EN 62047-1:2006
Withdrawn
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
Withdrawn date
01-06-2009
Published date
16-06-2006
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This part of EN 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
| Committee |
CLC/SR 47
|
| DocumentType |
Standard
|
| PublisherName |
European Committee for Standards - Electrical
|
| Status |
Withdrawn
|
| Standards | Relationship |
| PNE-prEN 62047-1 | Identical |
| UNE-EN 62047-1:2006 | Identical |
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