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EN ISO 18452:2016

Current

Current

The latest, up-to-date edition.

Fine ceramics (advanced ceramics, advanced technical ceramics) - Determination of thickness of ceramic films by contact-probe profilometer (ISO 18452:2005)

Published date

20-04-2016

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European foreword
1 Scope
2 Normative references
3 Terms and definitions
4 Principle of measurement
5 Test environment
6 Apparatus
7 Test pieces
8 Procedure
9 Calculation
10 Limits to step height
11 Test report
Annex A (informative) - Effect of amplification factor
        and levelling error on measured layer thickness

ISO 18452:2005 specifies a method for the determination of the film thickness of a fine ceramic film and ceramic coatings by a contact-probe profilometer. The method is suitable for film thicknesses in the range of 10 nm to 10 000 nm.

Committee
CEN/TC 184
DevelopmentNote
Supersedes EN 1071-1. (05/2016)
DocumentType
Standard
PublisherName
Comite Europeen de Normalisation
Status
Current
Supersedes

ISO 3274:1996 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments

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