EN ISO 18452:2016
Current
The latest, up-to-date edition.
Fine ceramics (advanced ceramics, advanced technical ceramics) - Determination of thickness of ceramic films by contact-probe profilometer (ISO 18452:2005)
20-04-2016
European foreword
1 Scope
2 Normative references
3 Terms and definitions
4 Principle of measurement
5 Test environment
6 Apparatus
7 Test pieces
8 Procedure
9 Calculation
10 Limits to step height
11 Test report
Annex A (informative) - Effect of amplification factor
and levelling error on measured layer thickness
ISO 18452:2005 specifies a method for the determination of the film thickness of a fine ceramic film and ceramic coatings by a contact-probe profilometer. The method is suitable for film thicknesses in the range of 10 nm to 10 000 nm.
| Committee |
CEN/TC 184
|
| DevelopmentNote |
Supersedes EN 1071-1. (05/2016)
|
| DocumentType |
Standard
|
| PublisherName |
Comite Europeen de Normalisation
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| UNI EN ISO 18452 : 2016 | Identical |
| NF EN ISO 18452 : 2016 | Identical |
| NS EN ISO 18452 : 2016 | Identical |
| BS EN ISO 18452:2016 | Identical |
| NEN EN ISO 18452 : 2016 | Identical |
| NBN EN ISO 18452 : 2016 | Identical |
| SN EN ISO 18452 : 2016 | Identical |
| DIN EN ISO 18452:2016-09 | Identical |
| I.S. EN ISO 18452:2016 | Identical |
| PN EN ISO 18452 : 2016 | Identical |
| ISO 18452:2005 | Identical |
| UNE-EN ISO 18452:2016 | Identical |
| ISO 3274:1996 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments |
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