EN ISO 25178-603:2025
Current
Current
The latest, up-to-date edition.
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments (ISO 25178-603:2025)
Published date
26-02-2025
Publisher
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This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
| Committee |
CEN/TC 290
|
| DocumentType |
Standard
|
| PublisherName |
Comite Europeen de Normalisation
|
| Status |
Current
|
| Standards | Relationship |
| BS EN ISO 25178-603:2025 | Equivalent |
| ÖNORM EN ISO 25178-603:2025 09 01 | Identical |
| SS-EN ISO 25178-603:2025 | Identical |
| DS/EN ISO 25178-603:2025 | Identical |
| NS-EN ISO 25178-603:2025 | Identical |
| I.S. EN ISO 25178-603:2025 | Equivalent |
| PN-EN ISO 25178-603:2025-07 | Identical |
| UNE-EN ISO 25178-603:2025 | Equivalent |
| UNE-EN ISO 25178-603:2025 | Identical |
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