FM 4911 : 2010
Current
The latest, up-to-date edition.
WAFER CARRIERS FOR USE IN CLEANROOMS
12-01-2013
1 INTRODUCTION
2 GENERAL INFORMATION
3 GENERAL REQUIREMENTS
4 PERFORMANCE REQUIREMENTS
5 OPERATIONS REQUIREMENTS
APPENDIX A: UNITS OF MEASUREMENT
APPENDIX B: FM APPROVALS CERTIFICATION MARKS
Describes performance requirements for wafer carriers used in cleanrooms by evaluating the ability of these products to limit fire spread and smoke damage.
DocumentType |
Standard
|
PublisherName |
Factory Mutual Research Corporation
|
Status |
Current
|
FM 4910 : 2013 | CLEANROOM MATERIALS FLAMMABILITY TEST PROTOCOL |
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