GOST R 8-628 : 2007 AMD 1 2011
Current
Current
The latest, up-to-date edition.
STATE SYSTEM FOR ENSURING THE UNIFORMITY OF MEASUREMENTS - SINGLE-CRYSTAL SILICON NANOMETER RANGE RELIEF MEASURES - REQUIREMENTS FOR GEOMETRICAL SHAPES, LINEAR SIZES AND MANUFACTURING MATERIAL SELECTION
Published date
12-01-2013
Publisher
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DocumentType |
Standard
|
PublisherName |
Interstandard (Russia)
|
Status |
Current
|
PD IEC/TS 62622:2012 | Nanotechnologies. Description, measurement and dimensional quality parameters of artificial gratings |
IEC TS 62622:2012 | Nanotechnologies - Description, measurement and dimensional quality parameters of artificial gratings |
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