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GOST R 8-628 : 2007 AMD 1 2011

Current

Current

The latest, up-to-date edition.

STATE SYSTEM FOR ENSURING THE UNIFORMITY OF MEASUREMENTS - SINGLE-CRYSTAL SILICON NANOMETER RANGE RELIEF MEASURES - REQUIREMENTS FOR GEOMETRICAL SHAPES, LINEAR SIZES AND MANUFACTURING MATERIAL SELECTION

Published date

12-01-2013

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DocumentType
Standard
PublisherName
Interstandard (Russia)
Status
Current

PD IEC/TS 62622:2012 Nanotechnologies. Description, measurement and dimensional quality parameters of artificial gratings
IEC TS 62622:2012 Nanotechnologies - Description, measurement and dimensional quality parameters of artificial gratings

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