Foreword
1 Scope
2 Normative references
3 Significance and use
4 Sampling
5 Test procedure
5.1 General
5.2 Preparation of the test
5.3 Test parameters
5.4 Example of test
6 Microscopic examination and measurement
6.1 Examination
6.2 Measurement
7 Definitions, symbols and calculation
7.1 Symbols and definitions
7.2 Calculations
8 Test report
Annex A (informative) Errors associated with using
different formulae for calculating film
thickness
Bibliography