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    I.S. EN 62047-26:2016

    Current The latest, up-to-date edition.

    SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 26: DESCRIPTION AND MEASUREMENT METHODS FOR MICRO TRENCH AND NEEDLE STRUCTURES

    Available format(s):  Hardcopy, PDF

    Language(s):  English

    Published date:  01-01-2016

    Publisher:  National Standards Authority of Ireland

    For Harmonized Standards, check the EU site to confirm that the Standard is cited in the Official Journal.
    Only cited Standards give presumption of conformance to New Approach Directives/Regulations.

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    Table of Contents - (Show below) - (Hide below)

    National Foreword
    FOREWORD
    1 Scope
    2 Normative references
    3 Terms and definitions
    4 Description of trench structures in a micrometer scale
    5 Description of needle structures in a micrometer scale
    6 Measurement method
    Annex A (informative) - Examples of measurement for
            trench and needle structures in a micrometer scale
    Annex B (informative) - Uncertainty in dimensional measurement
    Bibliography

    Abstract - (Show below) - (Hide below)

    Defines descriptions of trench structure and needle structure in a micrometer scale.

    General Product Information - (Show below) - (Hide below)

    Development Note For CENELEC adoptions of IEC publications, please check www.iec.ch to be sure that you have any corrigenda that may apply. (01/2017)
    Document Type Standard
    Publisher National Standards Authority of Ireland
    Status Current

    Standards Referencing This Book - (Show below) - (Hide below)

    ISO 3274:1996 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments
    ISO 129-1:2004 Technical drawings Indication of dimensions and tolerances Part 1: General principles
    ISO/IEC Guide 98-3:2008 Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)
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