I.S. EN ISO 14644-10:2022
Current
The latest, up-to-date edition.
Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022)
Hardcopy , PDF
English
07-06-2022
For Harmonized Standards, check the EU site to confirm that the Standard is cited in the Official Journal.
Only cited Standards give presumption of conformance to New Approach Directives/Regulations.
Dates of withdrawal of national standards are available from NSAI.
Important note : Users cannot be edited or removed once added to your Multi user PDF.
Foreword
1 Scope
2 Normative references
3 Terms and definitions
4 Testing and grading surface chemical levels
5 Measuring the cleanliness of surfaces for chemical contamination and demonstration of grade level compliance
Annex A (informative) Conversion between different unit expressions of surface concentration for chemical substances
Annex B (informative) Parameters influencing testing and interpretation of results
Annex C (informative) Essential considerations for a good cleanliness assessment
Annex D (informative) Methods for testing surface cleanliness for chemical concentration
Annex E (informative) Test record documentation
Bibliography
This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles).
| DocumentType |
Standard
|
| Pages |
44
|
| ProductNote |
The date of any NSAI previous adoption may not match the date of its original CEN/CENELEC document.
|
| PublisherName |
National Standards Authority of Ireland
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| ISO 14644-10:2022 | Identical |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.