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Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022)
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Available format(s): Hardcopy, PDF
Language(s): English
Published date: 07-06-2022
Publisher: National Standards Authority of Ireland
For Harmonized Standards, check the EU site to confirm that the Standard is cited in the Official Journal.Only cited Standards give presumption of conformance to New Approach Directives/Regulations.Dates of withdrawal of national standards are available from NSAI.
Foreword1 Scope2 Normative references3 Terms and definitions4 Testing and grading surface chemical levels5 Measuring the cleanliness of surfaces for chemical contamination and demonstration of grade level complianceAnnex A (informative) Conversion between different unit expressions of surface concentration for chemical substancesAnnex B (informative) Parameters influencing testing and interpretation of resultsAnnex C (informative) Essential considerations for a good cleanliness assessmentAnnex D (informative) Methods for testing surface cleanliness for chemical concentrationAnnex E (informative) Test record documentationBibliography
This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles).
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