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I.S. EN ISO 14644-9:2022

Current

Current

The latest, up-to-date edition.

Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration (ISO 14644-9:2022)

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

07-06-2022

For Harmonized Standards, check the EU site to confirm that the Standard is cited in the Official Journal.

Only cited Standards give presumption of conformance to New Approach Directives/Regulations.


Dates of withdrawal of national standards are available from NSAI.

Foreword
Introduction
1 Scope
2 Normative references.
3 Terms and definitions
4 Abbreviated terms
5 The surface cleanliness level assessment system
6 Demonstration of conformity
Annex A (informative) Surface characteristics
Annex B (informative) Descriptor for specific particle size ranges
Annex C (informative) Parameters influencing the SCP grading level assessments
Annex D (informative) Measurement methods for determining surface cleanliness by particle concentration
Bibliography

This document establishes a procedure for the assessment of particle cleanliness levels on solid surfaces in cleanrooms and associated controlled environment applications.

DocumentType
Standard
Pages
42
ProductNote
This standard also refers to CLC/TR 61340-5-2:2018. The date of any NSAI previous adoption may not match the date of its original CEN/CENELEC document.
PublisherName
National Standards Authority of Ireland
Status
Current
Supersedes

Standards Relationship
ISO 14644-9:2022 Identical

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