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ISO 13084:2018

Current

Current

The latest, up-to-date edition.

Surface chemical analysis — Secondary ion mass spectrometry — Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer

Available format(s)

Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users

Language(s)

English

Published date

15-11-2018

€92.00
Excluding VAT

This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.

Committee
ISO/TC 201/SC 6
DocumentType
Standard
Pages
15
PublisherName
International Organization for Standardization
Status
Current
Supersedes

Standards Relationship
BS ISO 13084:2018 Identical
JIS K 0157:2021 Identical
NEN-ISO 13084:2018 Identical

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