ISO 14291:2012
Current
The latest, up-to-date edition.
Vacuum gauges — Definitions and specifications for quadrupole mass spectrometers
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English
06-07-2012
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ISO 14291:2012 defines terms relevant to quadrupole mass spectrometers (QMSs) and specifies the parameters required for specification by QMS manufacturers necessary for proper calibration and for maintaining the quality of partial pressure measurement.
ISO 14291:2012 applies to QMSs with an ion source of the electron impact ionization type. Such QMSs are designed for the measurement of atomic mass-to-charge ratios m/z typically
| DevelopmentNote |
Supersedes ISO/DIS 14291. (07/2012)
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| DocumentType |
Standard
|
| Pages |
14
|
| PublisherName |
International Organization for Standardization
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| Status |
Current
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| Standards | Relationship |
| UNI ISO 14291:2020 | Identical |
| BS ISO 14291:2012 | Identical |
| ISO/TS 20175:2018 | Vacuum technology Vacuum gauges Characterization of quadrupole mass spectrometers for partial pressure measurement |
| ISO 27894:2009 | Vacuum technology Vacuum gauges Specifications for hot cathode ionization gauges |
| ISO 3529-3:2014 | Vacuum technology — Vocabulary — Part 3: Total and partial pressure vacuum gauges |
| ISO 3753:1977 | Vacuum technology — Graphical symbols |
| ISO/IEC Guide 99:2007 | International vocabulary of metrology Basic and general concepts and associated terms (VIM) |
| ISO 3529-1:1981 | Vacuum technology — Vocabulary — Part 1: General terms |
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