ISO 15632:2021
Current
The latest, up-to-date edition.
Microbeam analysis Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)
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English
12-02-2021
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This document defines the most important quantities that characterize an energy-dispersive Xray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This document is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This document specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309[2] and ASTM E1508[3] and is outside the scope of this document.
| DocumentType |
Standard
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| Pages |
13
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| PublisherName |
International Organization for Standardization
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| Status |
Current
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| Supersedes |
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