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ISO 17974:2002

Current

Current

The latest, up-to-date edition.

Surface chemical analysis High-resolution Auger electron spectrometers Calibration of energy scales for elemental and chemical-state analysis

Available format(s)

Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users

Language(s)

English, French

Published date

17-10-2002

€144.00
Excluding VAT

ISO 17974:2002 specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers used for elemental and chemical state analysis at surfaces. It also specifies a calibration schedule for testing the kinetic energy scale linearity at one intermediate energy, for confirming the uncertainty of the scale calibration at one low and one high kinetic energy value, for correcting for small drifts of that scale and defining the expanded uncertainty of the calibration of the kinetic energy scale for a confidence level of 95 % (with this uncertainty including contributions for behaviours observed in interlaboratory studies but not covering all possible defects).

It is applicable only to those instruments incorporating an ion gun for sputter cleaning. It is not applicable to instruments with kinetic energy scale errors significantly non-linear with energy, those operated at relative resolutions poorer than 0,2 % in the constant delta E/E mode or 1,5 eV in the constant delta E mode, those requiring tolerance limits of plus or minus 0,05 eV or less, nor those with an electron gun that cannot be operated in the energy range 5 keV to 10 keV. It does not provide a full calibration check for confirming the energy measured at each addressable point on the energy scale, this being performed according to the manufacturer's recommendations.

DevelopmentNote
Supersedes ISO/DIS 17974 (10/2002)
DocumentType
Standard
Pages
27
PublisherName
International Organization for Standardization
Status
Current

Standards Relationship
BS ISO 17974:2002 Identical
NF ISO 17974 : 2009 Identical
AS ISO 17974-2006 Identical

ISO 24236:2005 Surface chemical analysis Auger electron spectroscopy Repeatability and constancy of intensity scale
BS ISO 15471:2004 Surface chemical analysis. Auger electron spectroscopy. Description of selected instrumental performance parameters
ISO 17973:2016 Surface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysis
BS ISO 16242:2011 Surface chemical analysis. Recording and reporting data in Auger electron spectroscopy (AES)
BS ISO 17973:2002 Surface chemical analysis. Medium-resolution Auger electron spectrometers. Calibration of energy scales for elemental analysis
BS ISO 29081:2010 Surface chemical analysis. Auger electron spectroscopy. Reporting of methods used for charge control and charge correction
11/30230635 DC : 0 BS ISO 16129 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - PROCEDURES FOR ASSESSING THE DAY-TO-DAY PERFORMANCE OF AN X-RAY PHOTOELECTRON SPECTROMETER
ISO 16242:2011 Surface chemical analysis — Recording and reporting data in Auger electron spectroscopy (AES)
ISO 15471:2016 Surface chemical analysis Auger electron spectroscopy Description of selected instrumental performance parameters
BS ISO 24236:2005 Surface chemical analysis. Auger electron spectroscopy. Repeatability and constancy of intensity scale
04/30109364 DC : DRAFT FEB 2004 ISO 24236 - SURFACE CHEMICAL ANALYSIS - AUGER ELECTRON SPECTROSCOPY - REPEATABILITY AND CONSTANCY OF INTENSITY SCALE
NF ISO 29081 : 2010 SURFACE CHEMICAL ANALYSIS - AUGER ELECTRON SPECTROSCOPY - REPORTING OF METHODS USED FOR CHARGE CONTROL AND CHARGE CORRECTION
10/30199172 DC : 0 BS ISO 16242 - SURFACE CHEMICAL ANALYSIS - RECORDING AND REPORTING DATA IN AUGER ELECTRON SPECTROSCOPY (AES)
ISO 29081:2010 Surface chemical analysis Auger electron spectroscopy Reporting of methods used for charge control and charge correction

ISO/IEC 17025:2005 General requirements for the competence of testing and calibration laboratories
ISO 18115:2001 Surface chemical analysis Vocabulary

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