ISO 18516:2019
Current
The latest, up-to-date edition.
Surface chemical analysis — Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres
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English
14-01-2019
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This document describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis. It applies to all methods of surface analysis which use a beam to analyse the chemical composition of surfaces under defined settings of an instrument. It applies to scanning instruments, where a finely focused beam is scanned over the sample in a preselected field of view, as well as to full field imaging instruments, where the field of view is simultaneously imaged by a broad beam, an imaging lens system and a pixelated detector. The methods for measuring lateral resolution and sharpness are
— the straight edge method;
— the narrow line method;
— the grating method.
This document applies to instruments and methods that provide information on layers with nanometre thicknesses and to surfaces with nanometre‐sized structures and individual nano‐objects.
| Committee |
ISO/TC 201/SC 2
|
| DocumentType |
Standard
|
| Pages |
53
|
| PublisherName |
International Organization for Standardization
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| DIN ISO 18516:2020-11 | Identical |
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