Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy

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English

Published date

01-11-2024

Publisher

International Organization for Standardization

€130.00

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This document specifies a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy. This method applies to surfaces with an arithmetical mean roughness, R_a, in the range of about 1nm to 30nm and a mean width of roughness profile elements, R_sm, in the range of about 0,04μm to 2,5μm.

DocumentType	Standard
Pages	24
PublisherName	International Organization for Standardization
Status	Current
Supersedes	ISO 19606:2017

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ISO 19606:2024

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy

Shopping Cart

ISO 19606:2024

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy

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