Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments

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Hardcopy , PDF

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English, French

Published date

14-02-2025

Publisher

International Organization for Standardization

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This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.

DocumentType	Standard
Pages	18
PublisherName	International Organization for Standardization
Status	Current
Supersedes	ISO 25178-603:2013

Standards	Relationship
SS-EN ISO 25178-603:2025	Identical
DS/ISO 25178-603:2025	Identical
DS/EN ISO 25178-603:2025	Identical
NS-EN ISO 25178-603:2025	Identical
PN-EN ISO 25178-603:2025-07	Identical
BS EN ISO 25178-603:2025	Equivalent
I.S. EN ISO 25178-603:2025	Equivalent
UNE-EN ISO 25178-603:2025	Equivalent
UNE-EN ISO 25178-603:2025	Identical
DIN EN ISO 25178-603:2025-12	Equivalent

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ISO 25178-603:2025

Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments

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