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ISO/FDIS 14594

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

Microbeam analysis — Electron probe microanalysis — Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy

Available format(s)

Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users

Superseded date

07-06-2024

Language(s)

English

Published date

20-02-2024

€92.00
Excluding VAT

This document gives general guidelines for the determination of experimental parameters relating to the electron probe, the wavelength spectrometer, and the specimen that need to be taken into account when carrying out electron probe microanalysis. It also defines procedures for the determination of probe current, probe diameter, dead time, wavelength resolution, background, analysis area, analysis depth, and analysis volume.

This document is applicable for the analysis of a well-polished specimen using normal beam incidence.

This document does not apply to energy dispersive X-ray spectroscopy.

Committee
ISO/TC 202/SC 2
DocumentType
Draft
Pages
18
PublisherName
International Organization for Standardization
RevisionOf
Status
Superseded

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