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  • ISO/TR 19319:2013

    Current The latest, up-to-date edition.

    Surface chemical analysis Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

    Available format(s):  Hardcopy, PDF, PDF 3 Users, PDF 5 Users, PDF 9 Users

    Language(s):  English

    Published date:  06-03-2013

    Publisher:  International Organization for Standardization

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    Abstract - (Show below) - (Hide below)

    ISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF); experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings; physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.

    General Product Information - (Show below) - (Hide below)

    Document Type Technical Report
    Publisher International Organization for Standardization
    Status Current
    Supersedes

    Standards Referenced By This Book - (Show below) - (Hide below)

    PD ISO/TR 18196:2016 Nanotechnologies. Measurement technique matrix for the characterization of nano-objects
    15/30291643 DC : 0 BS ISO 18516 - SURFACE CHEMICAL ANALYSIS - DETERMINATION OF LATERAL RESOLUTION AND SHARPNESS IN BEAM BASED METHODS
    BS ISO 18516:2006 Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution
    BS ISO 15471:2004 Surface chemical analysis. Auger electron spectroscopy. Description of selected instrumental performance parameters
    ISO/TR 10993-22:2017 Biological evaluation of medical devices — Part 22: Guidance on nanomaterials
    ISO 18516:2006 Surface chemical analysis Auger electron spectroscopy and X-ray photoelectron spectroscopy Determination of lateral resolution
    09/30184131 DC : 0 BS ISO 29081 - SURFACE CHEMICAL ANALYSIS - AUGER ELECTRON SPECTROSCOPY - REPORTING OF METHODS USED FOR CHARGE CONTROL AND CHARGE CORRECTION
    ASTM E 2735 : 2014 : REDLINE Standard Guide for Selection of Calibrations Needed for X-ray Photoelectron Spectroscopy (XPS) Experiments
    PD ISO/TR 14187:2011 Surface chemical analysis. Characterization of nanostructured materials
    BS ISO 29081:2010 Surface chemical analysis. Auger electron spectroscopy. Reporting of methods used for charge control and charge correction
    ISO 15471:2016 Surface chemical analysis Auger electron spectroscopy Description of selected instrumental performance parameters
    09/30191895 DC : 0 BS ISO 10810 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - GUIDELINES FOR ANALYSIS
    ISO/TR 18196:2016 Nanotechnologies — Measurement technique matrix for the characterization of nano-objects
    ISO 29081:2010 Surface chemical analysis Auger electron spectroscopy Reporting of methods used for charge control and charge correction
    PD ISO/TR 10993-22:2017 Biological evaluation of medical devices Guidance on nanomaterials
    ISO/TR 14187:2011 Surface chemical analysis Characterization of nanostructured materials

    Standards Referencing This Book - (Show below) - (Hide below)

    ISO 22493:2014 Microbeam analysis Scanning electron microscopy Vocabulary
    ISO 9335:2012 Optics and photonics — Optical transfer function — Principles and procedures of measurement
    ISO 18516:2006 Surface chemical analysis Auger electron spectroscopy and X-ray photoelectron spectroscopy Determination of lateral resolution
    ASTM E 1217 : 2011 : REDLINE Standard Practice for Determination of the Specimen Area Contributing to the Detected Signal in Auger Electron Spectrometers and Some X-Ray Photoelectron Spectrometers
    ISO 9334:2007 Optics and photonics Optical transfer function Definitions and mathematical relationships
    ISO/IEC Guide 98-3:2008 Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)
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