JIS B 9920-2:2019
Current
The latest, up-to-date edition.
Cleanrooms and associated controlled environments -- Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
English
20-03-2019
This Standard describes the monitoring to assure that a cleanroom or clean zone performs and maintains the required control of air cleanliness by particle concentration. Also, this Standard specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.
| DocumentType |
Standard
|
| Pages |
0
|
| ProductNote |
THIS STANDARD ALSO REFERS:JIS B9920-1,JIS B 9917-3
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| PublisherName |
Japanese Standards Association
|
| Status |
Current
|
| Supersedes |
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