JIS B 9960-33:2012
Current
The latest, up-to-date edition.
Safety of machinery - Electrical equipment of machines Part 33: Requirements for semiconductor fabrication equipment
Hardcopy , PDF
English, Japanese
21-05-2012
Important note : Users cannot be edited or removed once added to your Multi user PDF.
This Japanese Industrial Standard applies to electrical equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.
| DocumentType |
Standard
|
| Pages |
132
|
| PublisherName |
Japanese Standards Association
|
| Status |
Current
|
| Standards | Relationship |
| IEC 60204-33:2009 | Identical |
Reaffirmed 2017
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