• JIS B 9960-33:2012

    Current The latest, up-to-date edition.

    Safety of machinery - Electrical equipment of machines Part 33: Requirements for semiconductor fabrication equipment

    Available format(s):  Hardcopy, PDF

    Language(s):  English, Japanese

    Published date:  21-05-2012

    Publisher:  Japanese Standards Association

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    Abstract - (Show below) - (Hide below)

    This Japanese Industrial Standard applies to electrical equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.

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    Document Type Standard
    Publisher Japanese Standards Association
    Status Current
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