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JIS C 5630-1:2017

Current

Current

The latest, up-to-date edition.

Semiconductor devices -- Micro-electromechanical devices -- Part 1: Terms and definitions

Published date

21-03-2017

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DocumentType
Standard
PublisherName
Japanese Standards Association
Status
Current
Supersedes

2017 [21/03/2017]2008(R2012) [22/10/2012]2008 [20/03/2008]

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