JIS C 5630-12:2014
Current
Current
The latest, up-to-date edition.
Semiconductor Devices - Micro-electromechanical Devices - Part 12: Bending Fatigue Testing Method Of Thin Film Materials Using Resonant Vibration Of Mems Structures
Available format(s)
Hardcopy
Language(s)
Japanese
Published date
20-02-2014
Publisher
| DocumentType |
Test Method
|
| Pages |
0
|
| PublisherName |
Japanese Standards Association
|
| Status |
Current
|
| Standards | Relationship |
| IEC 62047-12:2011 | Identical |
2014 [20/02/2014]
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