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JIS C 5630-2:2009

Current

Current

The latest, up-to-date edition.

Semiconductor Devices - Micro-electromechanical Devices - Part 2: Tensile Testing Method Of Thin Film Materials

Available format(s)

Hardcopy

Language(s)

Japanese

Published date

20-03-2009

DocumentType
Standard
Pages
0
PublisherName
Japanese Standards Association
Status
Current

Standards Relationship
IEC 62047-2:2006 Identical

2009(R2013) [21/10/2013]
2009 [20/03/2009]

JIS C 5630-3:2009 Semiconductor Devices - Micro-electromechanical Devices - Part 3: Thin Film Standard Test Piece For Tensile Testing

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