JIS C 5630-30:2020
Current
Current
The latest, up-to-date edition.
Semiconductor devices -- Micro-electromechanical devices -- Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
Available format(s)
Hardcopy
Language(s)
Japanese
Published date
23-03-2020
Publisher
| DocumentType |
Standard
|
| Pages |
16
|
| PublisherName |
Japanese Standards Association
|
| Status |
Current
|
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