JIS H 0614:1996
Current
Current
The latest, up-to-date edition.
Visual Inspection For Silicon Wafers With Specular Surfaces
Available format(s)
Hardcopy
Language(s)
Japanese
Published date
31-01-1996
Publisher
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Japanese Standards Association
|
| Status |
Current
|
96(R2001) [20/09/2001]
96 [01/01/1996]
78
| JIS C 7612:1985 | Illuminance measurements for lighting installations |
| JIS B 9920:2002 | Classification of air cleanliness for cleanrooms |
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