JIS K 0143:2000
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Surface chemical analysis -- Secondary ion mass spectrometry -- Determination of boron atomic concentration in silicon using uniformly doped materials
Published date
31-10-2000
Publisher
Superseded date
05-04-2023
Superseded by
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| DocumentType |
Standard
|
| PublisherName |
Japanese Standards Association
|
| Status |
Superseded
|
| SupersededBy |
| Standards | Relationship |
| ISO 14237:2000 | Identical |
2000 [20/07/2000]
| JIS Z 8402-2:1999 | Accuracy (trueness and precision) of measurement methods and results -- Part 2: Basic method for the determination of repeatability and reproducibility of a standard measurement method |
| JIS K 0164:2023 | Surface chemical analysis -- Secondary-ion mass spectrometry -- Method for depth profiling of boron in silicon |
| JIS K 0164:2010 | Surface chemical analysis -- Secondary-ion mass spectrometry -- Method for depth profiling of boron in silicon |
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