JIS K 0148:2026
Current
Current
The latest, up-to-date edition.
Surface chemical analysis-Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
Published date
20-01-2026
Publisher
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| DocumentType |
Standard
|
| PublisherName |
Japanese Standards Association
|
| Status |
Current
|
| Standards | Relationship |
| ISO 14706:2014 | Identical |
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