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JIS K 0160:2009

Current

Current

The latest, up-to-date edition.

Surface chemical analysis -- Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy

Published date

20-07-2009

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DocumentType
Standard
PublisherName
Japanese Standards Association
Status
Current

Standards Relationship
ISO 17331:2004 Identical

2009(R2014) [20/10/2014]2009 [20/07/2009]

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