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JIS K 0160:2026

Current

Current

The latest, up-to-date edition.

Surface chemical analysis-Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy

Published date

20-01-2026

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DocumentType
Standard
PublisherName
Japanese Standards Association
Status
Current

Standards Relationship
ISO 17331:2004 Identical

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