JIS K 0164:2010
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Surface Chemical Analysis - Secondary-ion Mass Spectrometry - Method For Depth Profiling Of Boron In Silicon
Available format(s)
Hardcopy
Superseded date
04-04-2023
Superseded by
Language(s)
Japanese
Published date
20-04-2010
Publisher
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Japanese Standards Association
|
| Status |
Superseded
|
| SupersededBy |
2010 [20/04/2010]
| JIS K 0143:2000 | Surface Chemical Analysis - Secondary Ion Mass Spectrometry - Determination Of Boron Atomic Concentration In Silicon Using Uniformly Doped Materials |
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