JIS R 1636:1998
Current
The latest, up-to-date edition.
Test method for thickness of fine ceramic thin films -- Film thickness by contact probe profilometer
English
31-01-1998
This Japanese Industrial Standard specifies the test method for thickness of fine ceramic thin films by a contact probe profilometer. The applicable range of the film thickness shall be 10 nm to 10000 nm.
| DocumentType |
Standard
|
| Pages |
6
|
| PublisherName |
Japanese Standards Association
|
| Status |
Current
|
Reaffirmed 2017
| JIS B 0651:2001 | Geometrical Product Specifications (GPS) -- Surface texture: Profile method -- Nominal characteristics of contact (stylus) instruments |
| JIS Z 8401:1999 | Guide to the rounding of numbers |
| JIS R 1600:1998 | Glossary of terms relating to fine ceramics |
| JIS R 1637:1998 | Test method for resistivity of conductive fine ceramic thin films with a four-point probe array |
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