NBN EN 62047-26 : 2016
Current
Current
The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 26: DESCRIPTION AND MEASUREMENT METHODS FOR MICRO TRENCH AND NEEDLE STRUCTURES
Published date
28-06-2016
Publisher
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Pertains to the structural design of MEMS and geometrical evaluation after MEMS processes.
| DocumentType |
Standard
|
| PublisherName |
Belgian Standards
|
| Status |
Current
|
| Standards | Relationship |
| IEC 62047-26:2016 | Identical |
| EN 62047-26:2016 | Identical |
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