NBN EN ISO 25178-603 : 2013
Current
Current
The latest, up-to-date edition.
GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: AREAL - PART 603: NOMINAL CHARACTERISTICS OF NON-CONTACT (PHASE-SHIFTING INTERFEROMETRIC MICROSCOPY) INSTRUMENTS (ISO 25178-603:2013)
Published date
27-05-2014
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Defines the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
| DocumentType |
Standard
|
| PublisherName |
Belgian Standards
|
| Status |
Current
|
| Standards | Relationship |
| EN ISO 25178-603:2013 | Identical |
| ISO 25178-603:2013 | Identical |
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