NEN EN IEC 62047-17 : 2015
Current
Current
The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 17: BULGE TEST METHOD FOR MEASURING MECHANICAL PROPERTIES OF THIN FILMS
Published date
18-08-2015
Publisher
Defines the method for performing bulge tests on the free-standing film that is bulged within a window.
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