NEN EN IEC 62047-21 : 2014
Current
Current
The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 21: TEST METHOD FOR POISSON'S RATIO OF THIN FILM MEMS MATERIALS
Published date
20-10-2014
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Defines the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 [mu]m.
| DocumentType |
Standard
|
| PublisherName |
Netherlands Standards
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| Status |
Current
|
| Standards | Relationship |
| EN 62047-21:2014 | Identical |
| IEC 62047-21:2014 | Identical |
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