NEN EN IEC 62047-4 : 2010

Current

Current The latest, up-to-date edition.

SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 4: GENERIC SPECIFICATION FOR MEMS

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Published date: 12-01-2013

Publisher: Netherlands Standards

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Explains generic specifications for micro-electromechanical systems (MEMS) made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, excluding optical MEMS, bio MEMS, micro TAS, and power MEMS.

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Document Type	Standard
ISBN
Pages
Published
Publisher	Netherlands Standards
Status	Current

International Equivalents – Equivalent Standard(s) & Relationship - (Show below) - (Hide below)

Equivalent Standard(s)	Relationship
IEC 62047-4:2008	Identical
EN 62047-4:2010	Identical

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